CS300 Mass Flow Controller&Flow Meter-Fornitore globale

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No. 8 Wenchang Avenue, Beijing Economic and Technological Development Zone (Postal Code: 100176)

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CS300 Mass Flow Controller&Flow Meter

The CS300 gas mass flow controller is a product designed specifically for large-scale integrated circuit equipment using the Seven Star flowmeter. The

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advantage

The accuracy adopts set point precision, and the product accuracy can reach ± 1.0% S.P., with the fastest response time ≤ 0.5sec.
The CS300 series products can be equipped with pressure compensation function to effectively compensate for the disturbance of gas pressure in the front section, reduce the impact of pressure changes on instantaneous flow rate, and ensure the stability and accuracy of product operation.
The principle of using a constant power sensor compensates for temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor.
High end products use specialized metal surface treatment technology, and all metal materials in contact with gas are made of 316LVV. The CS300C product has a metal surface roughness of less than 5RA and is strictly manufactured according to SEMI standards.

Technical Parameter

CS300
model	CS310C		CS320C		CS310D		CS320D
Valve type	Normally Open or Normally Closed	not have	Normally Open or Normally Closed	not have	Normally Open or Normally Closed	not have	Normally Open or Normally Closed	not have
Flow specification (N2)	(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
accuracy
linear	±0.5% F.S.
repeatability	±0.2% F.S.
response time	≤ 0.8sec （≤ 0.5sec optional）
Range of working pressure difference	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa
temperature coefficient	Zero point: ≤ ±0.02% F.S./℃； During adjustment: ≤ ±0.05% F.S./℃
pressure resistance	3.5 MPa
Leakage rate	1×10^-11Pa·m³/ sec He
Sealing material	metal seal
Maximum working pressure	0.45MPa
Ambient Temperature	（0～50）℃
Input signal	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have
output signal	Number: RS485 or DeviceNet Simulation: (0～5)VDC
drift	＜ 0.6% F.S./year without zero point correction
power supply	± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar)
surface chemical composition	Cr/Fe ratio ≥ 2.0; CrO thickness ≥ 20 (angstroms)				-
Surface roughness	Ra 5μinch
Standard joint form	VCR1/4 male connector; 1.125 "C-type sealing joint 1.125 "W-shaped sealing joint		1.5 "B-type sealing joint 1.5 "C-type sealing joint 1.5 "W-shaped sealed joint		VCR1/4 male connector; 1.125 "C-type sealing joint 1.125 "W-shaped sealing joint		1.5 "B-type sealing joint 1.5 "C-type sealing joint 1.5 "W-shaped sealed joint
Form of power connector	D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector
weight	1 Kg	0.8Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2Kg	1Kg

model	CS310C		CS320C
Valve type	Normally Open or Normally Closed	not have	Normally Open or Normally Closed	not have
Flow specification (N2)	(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
accuracy	±1% S.P. (≥35% F.S.) ±0.80% S.P. (≥30% F.S.) ±0.35% F.S. (＜35% F.S.) ±0.24% F.S. (＜30% F.S.)
linear	±0.5% F.S.
repeatability	±0.2% F.S.
response time	≤ 0.8sec （≤ 0.5sec optional）
Range of working pressure difference	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa	0.05-0.35MPa flow specification ≤ 10SLM 0.15~0.35MPa flow specification>10SLM	＜0.02 MPa
temperature coefficient	Zero point: ≤ ±0.02% F.S./℃； During adjustment: ≤ ±0.05% F.S./℃
pressure resistance	3.5 MPa
Leakage rate	1×10-11 Pa·m3 / sec He
Sealing material	metal seal
Maximum working pressure	0.45MPa
Ambient Temperature	（0～50）℃
Input signal	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have	Number: RS485 or DeviceNet Simulation: (0～5)VDC	not have
output signal	Number: RS485 or DeviceNet Simulation: (0～5)VDC
drift	＜ 0.6% F.S./year without zero point correction
power supply	± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar)
surface chemical composition	Cr/Fe ratio ≥ 2.0; CrO thickness ≥ 20 (angstroms)
Surface roughness	Ra 5μinch
Standard joint form	VCR1/4 male connector; 1.125 "C-type sealing joint 1.125 "W-shaped sealing joint		1.5 "B-type sealing joint 1.5 "C-type sealing joint 1.5 "W-shaped sealed joint
Form of power connector	D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector
weight	1 Kg	0.8Kg	1.2Kg	1Kg

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